A theoretical calculation of the electrical characteristics of the NFESE Microscopy

Author

Kyritsakis, A. ; Xanthakis, J.P. ; Kirk, T.L. ; Pescia, D.

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Tech. Univ. of Athens, Athens, Greece

fYear

2011

fDate

18-22 July 2011

Firstpage

89

Lastpage

90

Abstract

In the Near Field Scanning Electron Microscopy recently developed the tip of the microscope is placed a few tens of nm away from the anode. Measurements of voltage with respect to the tip-anode distance at constant current have been taken by Kirk et al. We have used a 3-dimensional WKB approximation to simulate these measurements. Our results are consistently 5-10 volts below the experimental ones. This was attributed to a thin WO₃ layer on the tip which we have not taken into account.

Keywords

scanning electron microscopy; voltage measurement; 3-dimensional WKB approximation; NFESE microscopy; Near Field Scanning Electron Microscopy; constant current; electrical characteristics; emission current; field emission; thin WO₃ layer; tip-anode distance; voltage measurements; Approximation methods; Current measurement; Electric potential; Ellipsoids; Kirk field collapse effect; Scanning electron microscopy; Field emission; NFESEM; WKB approximation; emission current;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2011 24th International

Conference_Location

Wuppertal

ISSN

pending

Print_ISBN

978-1-4577-1243-2

Electronic_ISBN

pending

Type

conf

Filename

6004576