• DocumentCode
    551339
  • Title

    A functional tiny electron gun for a true microcolumn

  • Author

    Koike, Akifumi ; Fujino, Takahiro ; Neo, Yoichiro ; Mimura, Hidenori ; Yoshida, Tomoya ; Nishi, Takashi ; Nagao, Masayoshi ; Murata, Hidekazu

  • Author_Institution
    Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
  • fYear
    2011
  • fDate
    18-22 July 2011
  • Firstpage
    107
  • Lastpage
    108
  • Abstract
    Abstract - We have designed and fabricated a novel triple-gated electron beam gun capable of generating a parallel electron beam. The beam profile was measured by the slit weeping method and we have confirmed the formation of parallel beam.
  • Keywords
    electron beam lithography; electron guns; functional tiny electron gun; parallel electron beam; slit weeping method; triple-gated electron beam gun; true microcolumn; Anodes; Current measurement; Electron beams; Focusing; Lenses; Logic gates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
  • Conference_Location
    Wuppertal
  • ISSN
    pending
  • Print_ISBN
    978-1-4577-1243-2
  • Electronic_ISBN
    pending
  • Type

    conf

  • Filename
    6004585
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=551339