Title :
CNT lateral field-emission electron source for an orbitron micropump
Author :
Grzebyk, Tomasz ; Górecka-Drzazga, Anna ; Dziuban, Jan A.
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In this work a lateral field emission electron source with electrodeposited CNT has been described. Test structures with different inter-electrodes gaps have been fabricated and measured. The electron emission has been tested in medium and low vacuum regime. Good performances of the source have been achieved: threshold voltage 100 V/100 μm, stable currents reaching 250 μA. It seems that this kind of electron source could be applied in an orbitron micropump.
Keywords :
carbon nanotubes; electrodeposition; electron field emission; micropumps; CNT lateral field-emission electron source; current 250 muA; electrodeposited CNT; electron emission; inter-electrodes gaps; orbitron micropump; test structures; Current measurement; Electron sources; Extraterrestrial measurements; Micromechanical devices; Micropumps; Nanoscale devices; Vacuum technology; CNT; field emission; vacuum micropump;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending
