New method to measure the surface deformation of optics irradiated by high-power laser and new way to stimulate its influence on beam quality

A new method was proposed to measure the surface deformation, where the optics is irradiated by a high power laser when they are measured with ZYGO interferometer. The fiber with output shaper was used to transmit the laser. With this simple and convenient method, measuring k9, fused silica and antireflection coated silica windows, where a power of 200W doubled YAG laser was used. Also a new way was proposed to simulate the influence of the deformation on beam quality with the way of substituting normalized Zernike polynomial coefficients of all optics measured by former method into Zemax software. The results preferably reveal the beam transmission distortion by thermal deformation of optics on true application conditions.