Title :
Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
Author :
Koh, Kah How ; Kobayashi, Takeshi ; Lee, Chengkuo
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications.
Keywords :
cantilevers; elemental semiconductors; gold; integrated optics; lead compounds; micro-optomechanical devices; micromirrors; piezoelectric actuators; piezoelectric thin films; silicon; 2D raster scanning applications; Au; MEMS mirror; PZT; gold-coated MEMS mirror; piezoelectric Pb(Zr,Ti)O<;sub>;3<;/sub>; actuators; silicon cantilever beam; thin film cantilever actuators; variable optical attenuation; Actuators; Attenuation; Micromechanical devices; Mirrors; Optical attenuators; Optical device fabrication; Voltage measurement;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2011 16th
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-288-2
Electronic_ISBN :
978-986-02-8974-9
