Title :
Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes
Author :
Hane, Kazuhiro ; Kanamori, Yoshiaki
Author_Institution :
Tohoku Univ., Sendai, Japan
Abstract :
Integrating ultra-small actuators based on MEMS technology with silicon submiciron waveguides, several kinds of optical switches are studied, which include physical contact of waveguides, variable air-gap coupler, Mach-Zehnder interferometer, etc.
Keywords :
Mach-Zehnder interferometers; elemental semiconductors; integrated optics; micro-optomechanical devices; microactuators; nanophotonics; optical couplers; optical switches; optical waveguides; silicon; MEMS actuators; Mach-Zehnder interferometer; Si; air-gap coupler; nanophotonics; optical switches; optical-path; silicon submicron-wide waveguide switches; ultrasmall actuators; Micromechanical devices; Optical coupling; Optical device fabrication; Optical switches; Optical waveguides; Silicon;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2011 16th
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-288-2
Electronic_ISBN :
978-986-02-8974-9
