Title :
The effects of pinhole diameter on beam stability of probe laser for precision thin-film optical inspection
Author :
Kuo, Chil-Chyuan ; Chen, Yi-Ruei ; Huang, Po-Jen
Author_Institution :
Dept. of Mech. Eng., Ming Chi Univ. of Technol., New Taipei, Taiwan
Abstract :
Five different diameters of pinhole are investigated experimentally. It is found that pinhole diameter of 0.3 mm is considered to be a promising candidate for mounting in front of probe laser for silicon thin-film optical inspection due to better peak power density stability and better beam-wander precision.
Keywords :
laser beams; optical properties; thin film transistors; beam stability; beam-wander precision; peak power density stability; pinhole diameter; precision thin-film optical inspection; probe laser; Density measurement; Inspection; Optical films; Optical filters; Optical variables measurement; Software;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2011 16th
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-288-2
Electronic_ISBN :
978-986-02-8974-9
