A drive-control system for 3D piezoelectric stick-slip positioner

The micro-positioning system composed of dynamic piezoelectric translation devices features nanoscale resolution, millimeters range, compact structure and availability in extreme operating conditions, and it is commonly used in field of micro-nano operation. To solve the problem of the drive and control of the piezoelectric stick-slip positioner, a 3-channel drive-control system is developed. The driver is designed with a high-power integrated operational amplifier based on a mixed approach of voltage control and current control. The two modes can be switched easily in the use. A high speed DSP chip is chosen as the core of the controller which receives and processes the commands from PC. Experimental results show that the drive-control system has a resolution less than 4.6mV, a linearity error of 0.014% and a full power response bandwidth up to 5 kHz.