Title :
Observation and analysis of micro pizza defects in organosilicon coatings of industrial manufacture
Author :
Wen-Long Yan ; Li Jia ; Hai-Ning Cui ; Pischow, Kaj
Author_Institution :
Key Lab. of Coherent Light & Atom/Mol. Spectra, Jilin Univ., Changchun, China
Abstract :
A transparent hard coating of Organosilicon (SiOx) material can protect plastics and metals. This investigation on SiOx was to optimize a protective film for plastic lenses and covers of mobile phones to upscale the process to an industrial size. Hexamethyldisiloxane and oxygen has been used as precursor gas. The coating was deposited using plasma enhanced chemical vapour deposition (PECVD). Analysis of the coating by means of the optical microscope and atomic force microscope (AFM) shows that there are four kinds of micro pizza defects classed. Mechanism on defects of the organosilicon coating is discussed.
Keywords :
atomic force microscopy; optical microscopy; plasma CVD; protective coatings; AFM; PECVD; atomic force microscope; hexamethyldisiloxane; industrial manufacture; metal protection; micropizza defects; mobile phone covers; optical microscope; organosilicon coatings; oxygen; plasma enhanced chemical vapour deposition; plastic lenses; plastic protection; precursor gas; protective film; transparent hard coating; Coatings; Films; Metals; Microscopy; Optical microscopy; Plasmas; Substrates; Hexamethyl disiloxane; Industrial manufacture; Micro pizza defects; Organosilicon coatings; PECVD;
Conference_Titel :
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location :
Harbin, Heilongjiang, China
Print_ISBN :
978-1-61284-087-1
DOI :
10.1109/EMEIT.2011.6023023
