Observation and analysis of micro pizza defects in organosilicon coatings of industrial manufacture

Author

Wen-Long Yan ; Li Jia ; Hai-Ning Cui ; Pischow, Kaj

Author_Institution

Key Lab. of Coherent Light & Atom/Mol. Spectra, Jilin Univ., Changchun, China

Volume

5

fYear

2011

fDate

12-14 Aug. 2011

Firstpage

2369

Lastpage

2372

Abstract

A transparent hard coating of Organosilicon (SiO_x) material can protect plastics and metals. This investigation on SiO_x was to optimize a protective film for plastic lenses and covers of mobile phones to upscale the process to an industrial size. Hexamethyldisiloxane and oxygen has been used as precursor gas. The coating was deposited using plasma enhanced chemical vapour deposition (PECVD). Analysis of the coating by means of the optical microscope and atomic force microscope (AFM) shows that there are four kinds of micro pizza defects classed. Mechanism on defects of the organosilicon coating is discussed.

Keywords

atomic force microscopy; optical microscopy; plasma CVD; protective coatings; AFM; PECVD; atomic force microscope; hexamethyldisiloxane; industrial manufacture; metal protection; micropizza defects; mobile phone covers; optical microscope; organosilicon coatings; oxygen; plasma enhanced chemical vapour deposition; plastic lenses; plastic protection; precursor gas; protective film; transparent hard coating; Coatings; Films; Metals; Microscopy; Optical microscopy; Plasmas; Substrates; Hexamethyl disiloxane; Industrial manufacture; Micro pizza defects; Organosilicon coatings; PECVD;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on

Conference_Location

Harbin, Heilongjiang, China

Print_ISBN

978-1-61284-087-1

Type

conf

DOI

10.1109/EMEIT.2011.6023023

Filename

6023023