Title :
Research on micro-electro-mechanical system computer aided design
Author :
Wang Xiaoyu ; Yu Linghui ; Xie Song
Author_Institution :
R&D Center, DFH Satellite Ltd. Co., Beijing, China
Abstract :
Micro-electro-mechanical system (MEMS) feature coupling of multiple energy domains, integration of multiple discipline, and mixing of analogy and digital signals. Therefore, the design of MEMS must recur to computer aided design (CAD). Aiming at the characteristic and the unique design method of MEMS, a design flow is proposed for MEMS CAD. Meanwhile, a structured layering designed method is constructed, and some key technologies are discussed.
Keywords :
micromechanical devices; technology CAD (electronics); MEMS CAD; MEMS feature coupling; analogy signals; digital signals; microelectromechanical system computer aided design; multiple energy domain; structured layering designed method; Computational modeling; Design automation; Design methodology; Integrated circuit modeling; Micromechanical devices; Software; Solid modeling; CAD; MEMS; key technology; structured layering designed method;
Conference_Titel :
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location :
Harbin, Heilongjiang, China
Print_ISBN :
978-1-61284-087-1
DOI :
10.1109/EMEIT.2011.6023393
