Title :
Error compensation algorithm and performance evaluation for phase-shifting interferometer
Author :
Mingxin Zhu ; Zhen Liu ; Yongxiang Xu
Author_Institution :
Coll. of Mech. Eng., Mongolia Univ. of Technol., Huhhot, China
Abstract :
Phase retrieval algorithms with a small number of grabbed buckets are very helpful to the phase-shifting interferometer (PSI) required real-time processing, so the algorithms within five buckets are very practical and are given more attention. In the paper, new 4 and 5-bucket algorithms are developed to compensate phase-shift deviation and detector nonlinearity. Numerical simulations and experiments performed on a Mach-Zehnder interferometer are carried out and verify that these two compensation algorithms hold a high degree of tolerance for two dominate error sources.
Keywords :
Mach-Zehnder interferometers; numerical analysis; phase shifting interferometry; 4-bucket algorithm; 5-bucket algorithm; Mach-Zehnder interferometer; detector nonlinearity; error compensation algorithms; error sources; grabbed buckets; numerical simulations; performance evaluation; phase retrieval algorithms; phase-shift deviation; phase-shifting interferometer; Detectors; Equations; Error compensation; Mathematical model; Optimized production technology; Phase measurement; Phase shifting interferometry; detector nonlinearity; error compensation algorithms; phase-shift deviation; phase-shifting interferometer;
Conference_Titel :
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location :
Harbin, Heilongjiang, China
Print_ISBN :
978-1-61284-087-1
DOI :
10.1109/EMEIT.2011.6023601