Title :
Improve run-to-run controllers using multivariate projection methods
Abstract :
Presents a collection of slides covering the following topics: run-to-run controllers; multivariate projection methods; design of experiments; PLS diagnostics; quality assurance; process control; quality control and virtual metrology.
Keywords :
design of experiments; quality control; statistical process control; PLS diagnostics; design of experiments; multivariate projection methods; process control; quality assurance; quality control; run-to-run controllers; virtual metrology; Aerospace electronics; Metrology; US Department of Energy;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
