Title :
Breakthrough for CW management and operation model in 200mm FAB by specialization technician
Author :
Chen, Y.H. ; Wang, C.L. ; Ho, M.Y.
Abstract :
Presents a collection of slides covering the following topics: CW management; central monitor center; specific monitor group; auto-sorter; premeasurement value inheritance; and control wafer transports.
Keywords :
materials handling; semiconductor device manufacture; wafer-scale integration; CW management; auto-sorter; central monitor center; control wafer transports; operation model; premeasurement value inheritance; specific monitor group; Dispatching; Loading; Monitoring; Productivity; Recycling; Schedules; Security;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
