DocumentCode :
556832
Title :
Tool matching statistical methodology & application
Author :
Huang, Sarah
Author_Institution :
Stat. Dev. & Applic. Dept., Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan
fYear :
2011
fDate :
5-6 Sept. 2011
Firstpage :
1
Lastpage :
8
Abstract :
Presents a collection of slides covering the following topics: tool matching; statistical methods and semiconductor manufacturing.
Keywords :
machine tools; semiconductor industry; statistical analysis; semiconductor manufacturing; statistical method; tool matching; Companies; Manufacturing processes; Production facilities; Qualifications; Statistical analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
ISSN :
1523-553X
Print_ISBN :
978-1-4577-1647-8
Type :
conf
Filename :
6086059
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=556832
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