Title :
Smart sampling by tool base dispatching in 300mm FAB
Author :
Huang, Tai-Siang
Author_Institution :
Rexchip Electronics Corp
Abstract :
Presents a collection of slides covering the following topics: smart sampling system; traditional metrology sampling control; manufacturing execution system; real-time dispatch; force sampling system; auto force function; and user define function.
Keywords :
computerised instrumentation; inspection; production engineering computing; semiconductor device manufacture; auto force function; computerised smart sampling inspection system; manufacturing execution system; real-time dispatch; semiconductor manufacturing; tool base dispatching; traditional metrology sampling control; user define function; Collaboration; Dispatching; Force; Inspection; Joints; Manufacturing; Monitoring;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
