DocumentCode
556846
Title
Framework for wafer level control APC model
Author
Onda, Hiroomi
Author_Institution
Yokohama Res. Lab., Hitachi Ltd., Yokohama, Japan
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
10
Abstract
A collection of slides from the author´s conference presentation about the framework for wafer level control APC model is presented.
Keywords
industrial control; semiconductor device manufacture; APC model; wafer level control; Logic gates; Manufacturing; Predictive models; Process control; Radar measurements; Semiconductor device measurement; Semiconductor device modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086073
Link To Document