Title :
Framework for wafer level control APC model
Author_Institution :
Yokohama Res. Lab., Hitachi Ltd., Yokohama, Japan
Abstract :
A collection of slides from the author´s conference presentation about the framework for wafer level control APC model is presented.
Keywords :
industrial control; semiconductor device manufacture; APC model; wafer level control; Logic gates; Manufacturing; Predictive models; Process control; Radar measurements; Semiconductor device measurement; Semiconductor device modeling;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
