Title :
Iron (Fe) removal from cyclohexanone thinner used in lithography process using nylon 6,6 membrane filtration
Author :
Umeda, Toru ; Nakajima, Takao ; Yukawa, Hiroto ; Tsuzuki, Shuichi ; Sumiya, Masato ; Numaguchi, Toru
Abstract :
Presents a collection of slides covering the following topics: iron removal process; lithography process; membrane filtration; cyclohexanone thinner; and metal reduction.
Keywords :
contamination; filtration; iron; lithography; pollution control; Fe; cyclohexanone thinner; iron removal process; lithography process; membrane filtration; metal reduction; Collaboration; Filtration; Fluids; Iron; Joints; Manufacturing;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
