Title :
High sensitivity focus failure monitoring by using CD-SEM
Author_Institution :
Renesas Electronics Corporation
Abstract :
A collection of slides is presented by the author. The slides are about semiconductor device manufacturing using CD-SEM.
Keywords :
semiconductor device manufacture; CD-SEM; high sensitivity focus failure monitoring; semiconductor device manufacturing; Analytical models; Collaboration; Data models; Joints; Manufacturing; Predictive models; Semiconductor device modeling;
Conference_Titel :
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4577-1647-8
