Synthesis of nanostructured TiO2 on transparent substrate by anodization of Ti thin films

Author

Manea, E. ; Purica, M. ; Budianu, E. ; Obreja, A.C. ; Dinescu, A.

Author_Institution

Nat. Inst. for R&D in Microtechnologies-IMT Bucharest, Bucharest, Romania

Volume

1

fYear

2011

fDate

17-19 Oct. 2011

Firstpage

61

Lastpage

64

Abstract

The paper presents the obtaining of nanostructured TiO₂ layers on glass and ITO/glass substrate by anodization in ammonium fluoride + ethylene glycol, as electrolyte. Anodic oxidation process of metallic Ti thin films was investigated by studying the changes in the surface morphology (SEM analysis) and in optical properties of the obtained TiO₂ layers transmittance spectra over the 200-900 nm spectral range).

Keywords

anodisation; electrolytes; infrared spectra; nanofabrication; nanostructured materials; oxidation; scanning electron microscopy; semiconductor materials; surface morphology; titanium compounds; ultraviolet spectra; visible spectra; ITO-SiO₂; SEM; TiO₂; UV-vis-NIR transmission spectra; ammonium fluoride; anodic oxidation; anodization; electrolyte; ethylene glycol; glass substrate; metallic thin films; nanostructured materials; optical properties; surface morphology; transmittance spectra; Glass; Nanotubes; Optical films; Scanning electron microscopy; Surface treatment; Titanium; Scanning Electron Microscopy; Ti films; TiO2 nanoporous layer; anodic oxidation;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2011 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-61284-173-1

Type

conf

DOI

10.1109/SMICND.2011.6095713

Filename

6095713