DocumentCode
557329
Title
Dispersion of the casting replication process for microfluidic structures
Author
Stanciu, Irina ; Obreja, Paula ; Muller, Raluca ; Dascalu, Dan
Author_Institution
Nat. Inst. for R&D in Microtechnol. (IMT), Bucharest, Romania
Volume
1
fYear
2011
fDate
17-19 Oct. 2011
Firstpage
159
Lastpage
162
Abstract
This paper presents a study of the dispersion of the casting replication process using SU-8 master structures. Samples of master structures and replicated microfluidics test structures are fabricated. The resulted master and replicated structures are measured. By experimental observations and by statistical analysis it is shown that the casting replication method has the same dispersion as the fabrication process of the used master structures.
Keywords
casting; microfabrication; microfluidics; replica techniques; SU-8 master structures; casting replication method; casting replication process dispersion; fabrication process; replicated microfluidics test structures; statistical analysis; Casting; Curing; Dispersion; Fabrication; Microfluidics; Polymers; Scanning electron microscopy; casting replication; fabrication dispersion;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2011 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-61284-173-1
Type
conf
DOI
10.1109/SMICND.2011.6095745
Filename
6095745
Link To Document