Title :
Dispersion of the casting replication process for microfluidic structures
Author :
Stanciu, Irina ; Obreja, Paula ; Muller, Raluca ; Dascalu, Dan
Author_Institution :
Nat. Inst. for R&D in Microtechnol. (IMT), Bucharest, Romania
Abstract :
This paper presents a study of the dispersion of the casting replication process using SU-8 master structures. Samples of master structures and replicated microfluidics test structures are fabricated. The resulted master and replicated structures are measured. By experimental observations and by statistical analysis it is shown that the casting replication method has the same dispersion as the fabrication process of the used master structures.
Keywords :
casting; microfabrication; microfluidics; replica techniques; SU-8 master structures; casting replication method; casting replication process dispersion; fabrication process; replicated microfluidics test structures; statistical analysis; Casting; Curing; Dispersion; Fabrication; Microfluidics; Polymers; Scanning electron microscopy; casting replication; fabrication dispersion;
Conference_Titel :
Semiconductor Conference (CAS), 2011 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-61284-173-1
DOI :
10.1109/SMICND.2011.6095745
