Title :
Investigation of millimeter wave membrane supported structures up to 110 GHz
Author :
Bunea, A.C. ; Neculoiu, D. ; Stefanescu, A. ; Buiculescu, C. ; Muller, A.
Author_Institution :
IMT-Bucharest, Bucharest, Romania
Abstract :
This paper investigates a series of membrane supported millimeter wave transmission lines up to 110 GHz. Two modeling approaches, based on EM simulations and equivalent circuit, were validated by the experimental results for different test structures. The effective permittivity of a membrane supported coplanar waveguide (CPW) line was extracted from measurements and it is in very good agreement with the simulated data.
Keywords :
coplanar waveguides; electromagnetic simulation; equivalent circuit; membrane supported coplanar waveguide; membrane supported millimeter wave transmission lines; millimeter wave membrane supported structures; Coplanar waveguides; Equivalent circuits; Frequency measurement; Integrated circuit modeling; Silicon; Solid modeling; Transmission line measurements; effective permittivity; electromagnetic modeling; millimeter wave components; silicon micromachining;
Conference_Titel :
Semiconductor Conference (CAS), 2011 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-61284-173-1
DOI :
10.1109/SMICND.2011.6095760
