Micromachined PMN-PT single crystal diaphragm for piezoelectric sensing applications

In this article, we demonstrate a piezoelectric micromachined diaphragm device based on PMN-PT single crystal thin layer. The electrical properties of the device are characterized. A finite element analysis is carried out for the fabricated model. Harmonic analysis is performed to investigate the vibrational modalities of the diaphragm. The FEA results show very good agreement with the experimental data. As an application example, a diaphragm device is coated with thiol carboxylic PEG (MW 5,000DA) as a resonator for bio mass sensing. The devices are also useful for many other applications including acoustic sensing, ultrasonic transducing, and vibration sensing, etc.