Title :
Design of feed-forward ΣΔ interface for MEMS based accelerometers
Author :
Liang, Wenquan ; Yang, Changchun ; Qiao, Donghai
Author_Institution :
Inst. of Geol. & Geophys., Beijing, China
Abstract :
High order ΣΔ interface is a practical choice for high resolution MEMS sensors. Previous researches are mainly about the determination of the coefficients of multiple feedback ΣΔ interfaces. In the work presented here, a systematic method for the design of feed forward ΣΔ interface is proposed. Simulations show that the utilizing the proposed method, feed forward method and the traditional multiple feedback structures have almost the same peak SQNRs when a compensator pole is added to the feed forward structure. However, feed forward structure has many advantages, so the proposed method is a promising alternative method for the multiple feedback structure.
Keywords :
accelerometers; sigma-delta modulation; MEMS based accelerometers; MEMS sensors; feed-forward sigma delta interface; multiple feedback structure; Feeds; Frequency modulation; Gain; Micromechanical devices; Noise; Sensors; Analog to Digital Conversion; Feed forward Sigma-Delta interface; MEMS; compensation filter; inertial accelerometer; optimal coefficients;
Conference_Titel :
Image and Signal Processing (CISP), 2011 4th International Congress on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-9304-3
DOI :
10.1109/CISP.2011.6100617