DocumentCode
558306
Title
A zero-level packaged RF-MEMS switch with large contact force
Author
Barrière, Fabien ; Pothier, Arnaud ; Crunteanu, Aurélian ; Chatras, Matthieu ; Blondy, Pierre
Author_Institution
XLIM Res. Inst., Univ. de Limoges, Limoges, France
fYear
2011
fDate
10-13 Oct. 2011
Firstpage
1229
Lastpage
1232
Abstract
This paper presents a novel compact RF-MEMS switch with large contact force. The switch can generate forces above 1.3mN, with 45V applied, while keeping a reasonable footprint. The actuator is based on a single metal 280μm diameter disc, that concentrates electrostatic force on a 8×8μm contact area. Zero level packaging is included in the fabrication, by integrating a metal electroplated shell fabricated above the mechanical part of the switch. The measured contact resistance of AuNi/Au contacts is 0.3Ω with 45V applied, and the off state capacitance of the packaged switch is 48fF.
Keywords
contact resistance; electronics packaging; electrostatics; gold alloys; microswitches; nickel alloys; AuNi-Au; actuator; compact RF-MEMS switch; contact force; contact resistance; electrostatic force; mechanical part; metal electroplated shell; reasonable footprint; resistance 0.3 ohm; voltage 45 V; zero level packaging; Actuators; Contact resistance; Force; Metals; Radio frequency; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2011 41st European
Conference_Location
Manchester
Print_ISBN
978-1-61284-235-6
Type
conf
Filename
6101950
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