Overview of RF high-permeability ferromagnetic thin films and its application to a new ferromagnetic/conductive multilayer to suppress skin effect in RF on-chip conductors

Ferromagnetic thin film materials with high permeability in the RF range are potential material for inductive passive components to endure “More-than-Moore” approach. This paper reviews state-of-the-art of ferromagnetic thin films and their applications for integrated inductors and electromagnetic noise suppressor. An innovative challenge to suppress skin effect in RF on-chip conductors is demonstrated, taking advantage of negative permeability of soft magnetic film obtained beyond the ferromagnetic resonance frequency.