Controller design and motion simulation of solar cell substrate handling robot in vacuum environment

According to high demand of market for the solar cell, there are active researches to increase the productivity of solar cell. The automated process line to produce solar cell can consist of various types of solar cell substrate handling robots such as cassette transfer robot, glass handling robot and vacuum robot. In order to reduce the tact time and increase the productivity, accurate position control with vibration rejection technique is becoming more important for the solar cell substrate handling robots. This paper is focusing on the substrate handling robot in vacuum environment and presents the design process for its controller. The simulation model for vacuum robot was constructed by using Matlab/SimMechanics and trajectory tracking performance was simulated by using Matlab/Simulink. The motion control simulation for vacuum robot is performed based on the tact time and the results are presented.