Title :
Meso-scale actuator design for the integrated dynamic alignment of a lenslet array within a package
Author :
Wilhelm, Stefan ; Kay, Robert W. ; Desmulliez, Marc P Y
Author_Institution :
Microsyst. Eng. Centre (MISEC), Heriot-Watt Univ., Edinburgh, UK
Abstract :
This paper describes the design of an LTCC-process compatible meso-scale actuator for the six degrees of freedom dynamic adjustment of micro-optical components, in particular the alignment of a microlens array on top of a UV-LED array. The lens array is specified to have an active area of 3mm × 3mm, the GaN array is 5mm × 5mm × 450μm. The focal length is 65μm. The actuator must enable the collimation or the focusing of the optical beams emanating from the LED array.
Keywords :
III-V semiconductors; gallium compounds; light emitting diodes; microactuators; microlenses; wide band gap semiconductors; GaN; LTCC-process compatible meso-scale actuator; UV-LED array; focal length; integrated dynamic alignment; lenslet array; micro-optical components; microlens array; size 3 mm; size 450 mum; size 5 mm; Actuators; Coils; Force; Laser beams; Materials; Metallization; Printing; LTCC; actuator; optical lenses; packaging;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
