Title :
Modulation instability in RF MEMS devices
Author :
Marcelli, Romolo ; Bartolucci, Giancarlo ; De Angelis, Giorgio ; Lucibello, Andrea ; Proietti, Emanuela
Author_Institution :
CNR-IMM Roma, Rome, Italy
Abstract :
Modulation instability generated by mechanical frequencies in RF MEMS switches is predicted and its potential contribution to the RF signal degradation is discussed. In particular, evaluations have been performed for double clamped configurations in shunt capacitive devices. As a conclusion, it is evidenced the possibility for the excitation of satellites affecting as noise sources higher than -40 dB the spectral purity of microwave sources.
Keywords :
microswitches; RF MEMS devices; RF MEMS switches; RF signal degradation; double-clamped configurations; mechanical frequencies; microwave sources; modulation instability; noise sources; satellite excitation; shunt capacitive devices; Bridge circuits; Coplanar waveguides; Metals; Micromechanical devices; RF signals; Radio frequency; Switches;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location :
Aix-en-Provence
Print_ISBN :
978-1-61284-905-8
