DocumentCode
559628
Title
A methodology for the pull-in voltage of clamped diaphragms
Author
Lardiès, Joseph ; Berthillier, Marc
Author_Institution
DMA, Inst. FEMTO-ST, Besancon, France
fYear
2011
fDate
11-13 May 2011
Firstpage
187
Lastpage
192
Abstract
Due to the electrostatic excitation principle, MEMS based capacitive microphones exhibit a nonlinear behaviour and this communication investigates these nonlinearities with the aim to optimize the input voltage signal. The nonlinear electrostatic force due to the bias voltage is combined with the 2D load-deflection model of a square or circular diaphragm to evaluate the pull-in voltage. An analytical solution is derived to calculate the electrostatic pressure, the pull-in voltage and the deflection profile of the diaphragm. Numerical results with clamped square and circular diaphragms are presented showing the effectiveness of the method.
Keywords
electrostatics; micromechanical devices; microphones; 2D load-deflection; MEMS based capacitive microphones; circular diaphragm; clamped diaphragms; electrostatic excitation; electrostatic pressure; nonlinear electrostatic force; pull-in voltage; square diaphragm; Approximation methods; Electrostatics; Equations; Force; Load modeling; Mathematical model; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location
Aix-en-Provence
Print_ISBN
978-1-61284-905-8
Type
conf
Filename
6108040
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