DocumentCode
559801
Title
A study on the improvement of mold life-time in UV nanoimprint
Author
Ozawa, Satoru ; Nakai, Yuusuke ; Jigami, Tetsuya ; Wakabayashi, Shigeo ; Fujiwara, Tadayuki
Author_Institution
Mitsubishi Rayon Co., Ltd., Hiroshima, Japan
fYear
2011
fDate
Oct. 30 2011-Nov. 2 2011
Firstpage
1
Lastpage
2
Abstract
Long mold-life time is great important for roll-to-roll process in UV nanoimprint. We investigated the cause of the decay of the releasing performance by various surface characterization methods. We optimized the coating condition of the releasing agent, and we have achieved the elongation of the mold life-time.
Keywords
X-ray photoelectron spectra; aluminium; metallic thin films; moulding; nanolithography; polymer films; rolling; secondary ion mass spectra; ultraviolet lithography; Al; UV nanoimprint; coating condition; decay; mold lifetime elongation; releasing agent; roll-to-roll process; surface characterization methods; X-ray imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Microopics Conference (MOC), 2011 17th
Conference_Location
Sendai
Print_ISBN
978-1-4577-1344-6
Type
conf
Filename
6110357
Link To Document