• DocumentCode
    561029
  • Title

    Additive photolithography based process for metal patterning using chemical reduction on surface modified polyimide

  • Author

    Watson, David E. ; Ng, Jack H -G ; Desmulliez, Marc P Y

  • Author_Institution
    Microsyst. Eng. Centre (MISEC), Heriot Watt Univ., Edinburgh, UK
  • fYear
    2011
  • fDate
    12-15 Sept. 2011
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    This article presents progress towards the direct metallisation of polyimide via silver ion impregnation and nanocluster formation using a novel solvent free photoresist prior to electroless silver plating. Such a process is envisaged to play a major part in the fabrication of a wide range of electronic devices, such as RFID, flexible electronics, biomedical applications, OLED, e-paper and flip-chip bonding applications by providing a quicker, greener and more cost effective methods of polymer electronics production. A new method involving the chemical reduction of silver ions is presented here providing a comparison to previous UV photoreduction experiments, and a further test for electrolessly plated microstructures.
  • Keywords
    photoresists; reduction (chemical); semiconductor device metallisation; OLED; RFID; UV photoreduction experiments; additive photolithography; biomedical applications; chemical reduction; e-paper bonding applications; electroless plated microstructures; electroless silver plating; electronic devices; flexible electronics; flip-chip bonding applications; metal patterning; nanocluster formation; polyimide direct metallisation; polymer electronics production; silver ion impregnation; solvent free photoresist; surface modified polyimide; Chemicals; Ions; Polyimides; Resists; Silver; Substrates; Electroless plating; Manufacturing Processes; Metallisation; Polyimide; Polymer Electronics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics and Packaging Conference (EMPC), 2011 18th European
  • Conference_Location
    Brighton
  • Print_ISBN
    978-1-4673-0694-2
  • Type

    conf

  • Filename
    6142411