Title :
Requirements for microfluidic sensors based on ceramic technologies in high temperature chemical processes
Author :
Hildebrandt, Samuel ; Wolter, Klaus-Jürgen
Author_Institution :
Electron. Packaging Lab., Tech. Univ. Dresden, Dresden, Germany
Abstract :
After a short introduction into one actual development in the field of chemical reaction engineering, the requirements resulting from the application of sensors in a chemical reactor are shown. Physical quantities of interest when investigating and running chemical reactions are specified. As an example, the implementation of a multi-channel temperature sensor is described. Due to the chosen sensor technology, it was necessary to find a working combination of a chemically resistant steel and an electrically insulating glass paste. The compatibility of steel grade 1.4571 and Heraeus SD 1000 glass is shown.
Keywords :
ceramic packaging; chemical reactions; high-temperature techniques; microfluidics; temperature sensors; ceramic technologies; chemical reaction engineering; high temperature chemical processes; microfluidic sensors; multichannel temperature sensor; Chemical sensors; Chemicals; Electron tubes; Materials; Steel; Temperature sensors; Chemical Reaction Engineering; High Temperature; Microfluidic Sensor;
Conference_Titel :
Microelectronics and Packaging Conference (EMPC), 2011 18th European
Conference_Location :
Brighton
Print_ISBN :
978-1-4673-0694-2
