Title :
A comparison of approaches for ultra-low-loss waveguides
Author :
Bauters, Jared F. ; Heck, Martijn J R ; John, Demis D. ; Barton, Jonathon S. ; Blumenthal, Daniel J. ; Bowers, John E. ; Bruinink, Christiaan M. ; Leinse, Arne ; Heideman, René G.
Author_Institution :
Univ. of California, Santa Barbara, CA, USA
Abstract :
We compare ultra-low-loss silica waveguides with PECVD SiO2, borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.
Keywords :
borosilicate glasses; claddings; optical glass; optical losses; optical planar waveguides; phosphosilicate glasses; plasma CVD; silicon compounds; wafer bonding; BPSG; PECVD; borophosphosilicate glass; planar waveguides; propagation loss; thermal oxide upper claddings; ultralow-loss silica waveguides; wafer bonding; Absorption; Loss measurement; Optical waveguides; Propagation losses; Scattering; Stress; Thermal stresses;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4673-0262-3
