• DocumentCode
    562055
  • Title

    A comparison of approaches for ultra-low-loss waveguides

  • Author

    Bauters, Jared F. ; Heck, Martijn J R ; John, Demis D. ; Barton, Jonathon S. ; Blumenthal, Daniel J. ; Bowers, John E. ; Bruinink, Christiaan M. ; Leinse, Arne ; Heideman, René G.

  • Author_Institution
    Univ. of California, Santa Barbara, CA, USA
  • fYear
    2012
  • fDate
    4-8 March 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We compare ultra-low-loss silica waveguides with PECVD SiO2, borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.
  • Keywords
    borosilicate glasses; claddings; optical glass; optical losses; optical planar waveguides; phosphosilicate glasses; plasma CVD; silicon compounds; wafer bonding; BPSG; PECVD; borophosphosilicate glass; planar waveguides; propagation loss; thermal oxide upper claddings; ultralow-loss silica waveguides; wafer bonding; Absorption; Loss measurement; Optical waveguides; Propagation losses; Scattering; Stress; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference
  • Conference_Location
    Los Angeles, CA
  • ISSN
    pending
  • Print_ISBN
    978-1-4673-0262-3
  • Type

    conf

  • Filename
    6192038