A SU8 Micromachined WR-1.5 Band Waveguide Filter

Author

Xiaobang Shang ; Yingtao Tian ; Lancaster, Michael J. ; Singh, Sushil

Author_Institution

Sch. of Electron., Electr. & Comput. Eng., Univ. of Birmingham, Birmingham, UK

Volume

23

Issue

6

fYear

2013

fDate

Jun-13

Firstpage

300

Lastpage

302

Abstract

A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μm. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband insertion loss is measured to be 0.65 dB and the return loss is better than 11 dB over the whole passband.

Keywords

band-pass filters; micromachining; photoresists; resonator filters; submillimetre wave filters; waveguide filters; SU8 micromachined WR-1.5 band waveguide filter; SU8 photoresist technology; WR-1.5 band waveguide 3rd order bandpass filter; frequency 500 GHz to 750 GHz; frequency 53.7 GHz; loss 0.65 dB; median passband insertion loss; offset resonator; silver-coated SU8 layer; size 191 mum; Filter; SU8 micromachining; WR-1.5; millimeter wave devices; waveguide;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2013.2260733

Filename

6515163