DocumentCode
562518
Title
CMOS image sensor on microcavities and local SOI-structures
Author
Druzhinin, Anatolij ; Holota, Victor ; Kogut, Igor ; Dovgyj, Victor ; Khoverko, Yuriy
Author_Institution
Lviv Polytechnik Nat. Univ., Lviv, Ukraine
fYear
2012
fDate
21-24 Feb. 2012
Firstpage
525
Lastpage
526
Abstract
The structure of sensor images on “silicon-oninsulator” local structures is proposed and possibility of monolithic integration of sensing elements and signal processing systems is shown.
Keywords
CMOS image sensors; microcavities; monolithic integrated circuits; silicon-on-insulator; CMOS image sensor; local SOl structure; microcavity; monolithic integration; sensing element; signal processing system; silicon-on-insulator; CMOS integrated circuits; Cavity resonators; Solids; Switches; Transistors; SOI-structure; image sensor; microcavities; monolithic integration; sensor element;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering Telecommunications and Computer Science (TCSET), 2012 International Conference on
Conference_Location
Lviv-Slavske
Print_ISBN
978-1-4673-0283-8
Type
conf
Filename
6192755
Link To Document