Title :
New approach for modeling processes of doping redistribution during oxidization
Author :
Berezhansky, Volodymyr
Author_Institution :
Precarpathian Nat. Univ., Ivano-Frankivsk, Ukraine
Abstract :
Redistribution of doping during diffusive -oxidizing processes is simulated. The optimal technological conditions of diffusive -oxidizing processes is determined.
Keywords :
doping profiles; oxidation; Deale-Grove model; diffusive-oxidizing processes; doping concentration; doping redistribution; Alloying; Oxidation; The Deale-Grove´s model; diffusive - oxidizing processes; interphase border; numerical methods; quasilinear process;
Conference_Titel :
Modern Problems of Radio Engineering Telecommunications and Computer Science (TCSET), 2012 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-1-4673-0283-8
