• DocumentCode
    563415
  • Title

    Fiber-optics coupled detector arrays using thin film cadmium sulfide Schottky diodes

  • Author

    Palmer, John P.

  • Author_Institution
    California State Polytech. Univ., Pomona, CA, USA
  • fYear
    1974
  • fDate
    9-11 Dec. 1974
  • Firstpage
    67
  • Lastpage
    68
  • Abstract
    Epitaxial films of cadmium sulfide grown on silicon and on germanium are used as the basis for Pt-CdS photovoltaic Schottky diodes. The CdS films are vacuum deposited using a resistance heated source and an alumina crucible. The rate of deposition is approximately 300 Angstroms per minute, and the substrate temperature during deposition is 275°C. The platinum films are deposited from a second, tungsten, resistance heated source at a rate of about 7 Angstroms per minute. The thicknesses of the CdS and Pt films are typically 1 micron and 40 Angstroms, respectively. Electrical contact to the platinum electrode is made by thermocompression bonding gold wire to an aluminum pad deposited on the platinum.
  • Keywords
    II-VI semiconductors; Schottky diodes; alumina; cadmium compounds; electrical contacts; elemental semiconductors; fibre optic sensors; germanium; lead bonding; platinum; semiconductor epitaxial layers; semiconductor growth; semiconductor thin films; sensor arrays; silicon; vacuum deposited coatings; wide band gap semiconductors; Ge; Pt-CdS; Si; alumina crucible; aluminum pad deposition; electrical contact; epitaxial films; fiber-optics coupled detector arrays; gold wire; photovoltaic Schottky diodes; platinum electrode; resistance heated source; size 1 micron; temperature 275 degC; thermocompression bonding; thin film cadmium sulfide Schottky diodes; vacuum deposition; Optical detectors; Optical fiber sensors; Optical fibers; Optical films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 1974 International
  • Conference_Location
    Washington, DC
  • ISSN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.1974.6219613
  • Filename
    6219613