Formation of DLC by a pure carbon arc under high vacuum

The plasma of arc discharge of solid carbon has been applied to the formation of hard carbon thin films. A double-mesh electrode is placed at the exit of the sharply directed arc plasma column confined in the magnetic bottle. The RF voltage applied to the electrode is effective to diverge the plasma column radially to form a uniform plasma in front of the substrate and also to remove macroparticles. The characteristics of the obtained film are examined by Raman spectra, etc.