Plasma destruction of fluorocarbons

The destruction of fluorocarbons such as chlorofluorocarbons (CFCs) is desirable technology because of stratospheric ozone depletion and global climatic changes,. In the present paper, the technologies for CFC destruction in Japan, which are currently in practice, were briefly described. Responding to the global environmental problems, we successfully developed a destruction system using an inductively-coupled radio-frequency plasma. The design of the plasma torch, the performance of the system, and the environmental emissions are also described.