• DocumentCode
    563931
  • Title

    High-flux ion implantation of 60 keV Cu− into LiNbO3 and in-situ optical spectroscopy

  • Author

    Kishimot, Naoki ; Plaksin, Oleg A. ; Masuo, Kazuya ; Takeda, Yoshihiko

  • Author_Institution
    Nanomater. Lab., Nat. Inst. for Mater. Sci., Tsukuba, Japan
  • fYear
    2004
  • fDate
    18-23 July 2004
  • Firstpage
    568
  • Lastpage
    571
  • Abstract
    Lithium niobate LiNbO3 is a ferroelectric insulator promising for nonlinear optical applications, but the material phase under high-flux ion bombardment is instable. Ion-induced optical emission (IIP E) of LiNbO3 was measured during implantation of 60 keV Cu− at ion fluxes from 1 to 100 µA/cm2. The IIPE well diagnosed significant atomic release and compositional change of the near-surface layer. In-situ spectroscopy provides important information to optimize fabrication conditions.
  • Keywords
    Atom optics; Optical imaging; Radiation effects; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    High-Power Particle Beams (BEAMS 2004), 2004 International Conference on
  • Conference_Location
    Saint Petersburg
  • Print_ISBN
    978-5-87911-088-3
  • Type

    conf

  • Filename
    6220610
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=563931