Methodology for development of LVS and LPE rule sets adapted for MEMS processes

Author

Pashev, Angel ; Uzunov, Ivan ; Gaydazhiev, Dobromir ; Pukneva, Diana ; Manolov, Emil

Author_Institution

Microelectron. Technol. Dept., Smartcom Bulgaria AD, Sofia, Bulgaria

fYear

2012

fDate

24-26 May 2012

Firstpage

370

Lastpage

375

Abstract

The paper describes a methodology for development of LVS and LPE rule sets adapted for microelectromechanical technologies. The method is applied on an existing multipurpose MEMS process. To evaluate the accuracy and performance of the proposed method, parasitic extraction is performed on several different devices designed with the chosen MEMS technology. The LPE results are compared to reference results obtained through finite element analyses (FEA).

Keywords

finite element analysis; micromechanical devices; FEA; LPE rule sets; LVS rule sets; MEMS technology; finite element analysis; layout parasitic extraction rule set; layout versus schematic rule set; microelectromechanical technology; multipurpose MEMS process; Actuators; Capacitance; Capacitors; Etching; Layout; Micromechanical devices; Electronic Design Automation (EDA); Layout Parasitic Extraction (LPE); Layout versus Schematic (LVS); Microelectromechanical Systems (MEMS); modeling; simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed Design of Integrated Circuits and Systems (MIXDES), 2012 Proceedings of the 19th International Conference

Conference_Location

Warsaw

Print_ISBN

978-1-4577-2092-5

Type

conf

Filename

6226223