Title :
Methodology for development of LVS and LPE rule sets adapted for MEMS processes
Author :
Pashev, Angel ; Uzunov, Ivan ; Gaydazhiev, Dobromir ; Pukneva, Diana ; Manolov, Emil
Author_Institution :
Microelectron. Technol. Dept., Smartcom Bulgaria AD, Sofia, Bulgaria
Abstract :
The paper describes a methodology for development of LVS and LPE rule sets adapted for microelectromechanical technologies. The method is applied on an existing multipurpose MEMS process. To evaluate the accuracy and performance of the proposed method, parasitic extraction is performed on several different devices designed with the chosen MEMS technology. The LPE results are compared to reference results obtained through finite element analyses (FEA).
Keywords :
finite element analysis; micromechanical devices; FEA; LPE rule sets; LVS rule sets; MEMS technology; finite element analysis; layout parasitic extraction rule set; layout versus schematic rule set; microelectromechanical technology; multipurpose MEMS process; Actuators; Capacitance; Capacitors; Etching; Layout; Micromechanical devices; Electronic Design Automation (EDA); Layout Parasitic Extraction (LPE); Layout versus Schematic (LVS); Microelectromechanical Systems (MEMS); modeling; simulation;
Conference_Titel :
Mixed Design of Integrated Circuits and Systems (MIXDES), 2012 Proceedings of the 19th International Conference
Conference_Location :
Warsaw
Print_ISBN :
978-1-4577-2092-5
