Title :
Smoothing and surface planarization of sacrificial layers in MEMS technology
Author :
Lucibello, Andrea ; Proietti, Emanuela ; Marcelli, Romolo ; Bartolucci, Giancarlo
Author_Institution :
IMM, Rome, Italy
Abstract :
In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
Keywords :
gold; metallisation; micromechanical devices; planarisation; polymer films; MEMS technology; Shipley Microposit S1818; double clamped bridge profiles; gold; metal thickness homogeneity; microelectromechanical system; polymer sacrificial layer edges; sacrificial layer smoothing; standard polymers; structural layer; surface planarization; Bridge circuits; Metals; Micromachining; Micromechanical devices; Polymers; Surface topography; Surface treatment; Planarization; RF MEMS; Sacrificial Layer; Smoothing;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
