Title :
Thermal analysis of LTCC packaged MEMS atomic clock
Author :
Chutani, Ravinder ; Galliou, Serge ; Passilly, Nicolas ; Gorecki, Christophe ; Sitomaniemi, Aila ; Heikkinen, Mikko ; Kautio, Kari ; Keränen, Antti ; Jornod, Alain
Author_Institution :
Inst. FEMTO-ST, UFC, Besancon, France
Abstract :
This paper describes the thermal analysis of LTCC packaged Cs vapour cell for MEMS atomic clock. Aim is to maintain the temperature of the inner cell trapping the Cs vapour, which is a critical parameter for stable MEMS atomic clock.
Keywords :
atomic clocks; ceramic packaging; micromechanical devices; thermal analysis; LTCC packaged Cs vapour cell; LTCC packaged MEMS atomic clock; inner cell trapping; low temperature cofired ceramic package; stable MEMS atomic clock; thermal analysis; Atomic clocks; Coatings; Electronic packaging thermal management; Micromechanical devices; Temperature control; Temperature distribution; Temperature sensors; LTCC package; MEMS; atomic clock; thermal analysis;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
