• DocumentCode
    564774
  • Title

    Damage on Aluminum freestanding thin films submitted to uniaxial tensile stress

  • Author

    Fourcade, Thibaut ; Broue, A. ; Desmarres, Jean-Michel ; Seguineau, Cedric ; Dalverny, Olivier ; Plana, Robert

  • Author_Institution
    NOVAMEMS, France
  • fYear
    2012
  • fDate
    25-27 April 2012
  • Firstpage
    71
  • Lastpage
    71
  • Abstract
    Summary form only given. This paper describes a new technique allowing the monitoring of damage in metallic freestanding thin films during micro-tensile test by using electrical characterization. After a presentation of the set-up, results obtained on Aluminum thin coatings are presented and commented.
  • Keywords
    aluminium; condition monitoring; metallic thin films; micromechanics; tensile testing; aluminum freestanding thin films; aluminum thin coatings; damage monitoring; electrical characterization; metallic freestanding thin films; microtensile test; uniaxial tensile stress; Monitoring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
  • Conference_Location
    Cannes
  • Print_ISBN
    978-1-4673-0785-7
  • Type

    conf

  • Filename
    6235314
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=564774