Title :
Damage on Aluminum freestanding thin films submitted to uniaxial tensile stress
Author :
Fourcade, Thibaut ; Broue, A. ; Desmarres, Jean-Michel ; Seguineau, Cedric ; Dalverny, Olivier ; Plana, Robert
Author_Institution :
NOVAMEMS, France
Abstract :
Summary form only given. This paper describes a new technique allowing the monitoring of damage in metallic freestanding thin films during micro-tensile test by using electrical characterization. After a presentation of the set-up, results obtained on Aluminum thin coatings are presented and commented.
Keywords :
aluminium; condition monitoring; metallic thin films; micromechanics; tensile testing; aluminum freestanding thin films; aluminum thin coatings; damage monitoring; electrical characterization; metallic freestanding thin films; microtensile test; uniaxial tensile stress; Monitoring;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
