Title :
Development of local ambient gas control technologies for atmospheric MEMS process
Author :
Naito, Teruki ; Konno, Nobuaki ; Tokunaga, Takashi ; Itoh, Toshihiro
Author_Institution :
Macro BEANS Center, BEANS Lab., Tsukuba, Japan
Abstract :
We report on a local ambient gas control technologies for atmospheric pressure plasma process using our new curtain gas structure. First, local ambient gas control with the curtain gas structure was investigated by computational fluid dynamic code. After confirmation of the feasible cleanness level with this structure, which is comparable to impurity level in semiconductor grade material gas (below 1 ppm), we fabricated a prototype apparatus. Measuring gas distribution by a gas analyzer, local ambient gas control was confirmed experimentally. Next, we attempted H2/He plasma generation in open air with H2 concentration even above explosive limit in air (4.1 %) and achieved stable glow discharge with H2 concentration of 0-40 %. In addition, reduction of copper oxides was demonstrated by H2 plasma exposure. These results show high potential of our method for atmospheric MEMS processes.
Keywords :
computational fluid dynamics; explosives; glow discharges; microfabrication; micromechanical devices; plasma applications; plasma diagnostics; plasma instability; reduction (chemical); H2 concentration; H2 plasma exposure; atmospheric MEMS process; atmospheric pressure plasma process; cleanness level; computational fluid dynamic code; curtain gas structure; explosive limit; gas analyzer; gas distribution measurement; glow discharge stability; impurity level; local ambient gas control technologies; plasma generation; pressure 1 atm; prototype apparatus fabrication; semiconductor grade material gas; Atmospheric modeling; Copper; Fluid flow; Helium; Micromechanical devices; Plasmas; Process control;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
