DocumentCode :
564778
Title :
Control of the ion diffusion coefficient in a nanochannel
Author :
Tsai, Yu-Tze ; Wang, Gou-Jen
Author_Institution :
Dept. of Mech. Eng., Nat. Chung-Hsing Univ., Taichung, Taiwan
fYear :
2012
fDate :
25-27 April 2012
Firstpage :
111
Lastpage :
116
Abstract :
In this study, we first propose a simple yet novel method to measure the diffusion coefficient of ions through a nanochannel. Back-side track etching is used for the fabrication of a nanochannel on an n-type silicon substrate. A metal-oxide semiconductor field-effect transistor (MOSFET) like device named the metal-semiconductor-solution field-effect transistor (MSSFET) is implemented to control the ion diffusion current. When a negative gate voltage is applied, positive ions that travel along the nanochannel are confined to the central zone of the nanochannel allowing the radial Brownian movements to be reduced. The effect is equivalent to an increase of the diffusion coefficient. However, a positive gate voltage can produce an opposite Zeta potential on the nanochannel surface. The cations in the nanochannel are dragged to the channel surface. This condition can be regarded as a decrease of the diffusion coefficient. Experimental results illustrate that the transfer characteristics of the MSSFET are similar to those of a p-channel depletion-type MOSFET. The ion diffusion coefficient in a nanochannel can be controlled when the the initial ion concentration difference across a nanochannel is larger than a certain threshold.
Keywords :
Brownian motion; MOSFET; diffusion; electrokinetic effects; elemental semiconductors; etching; silicon; MSSFET; Si; Zeta potential; back-side track etching; channel surface; diffusion coefficient; equivalent effect; initial ion concentration difference; ion diffusion coefficient; ion diffusion current control; metal-oxide semiconductor field-effect transistor; metal-semiconductor-solution field-effect transistor; n-type silicon substrate; nanochannel fabrication; nanochannel surface; negative gate voltage; p-channel depletion-type MOSFET; positive gate voltage; positive ions; radial Brownian movements; transfer characteristics; Etching; Molecular beam epitaxial growth; Optical films; Structural rings; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
Type :
conf
Filename :
6235318
Link To Document :
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