Title :
DC and Pulsed electrodeposition of SmCo thin films
Author :
Chouarbi, K. ; Woytasik, M. ; Lefeuvre, E. ; Moulin, J.
Author_Institution :
Inst. d´´Electron. Fondamentale, Univ. Paris Sud, Orsay, France
Abstract :
Thin films of SmCo have been produced by electrodeposition in a Hull cell from aqueous solution. The composition of the films is dependant on the supplying mode - continuous or pulsed current. The influence of the cobalt concentration in the electrolytic solution, as well as the presence of a supporting electrolyte has been also studied. A systematic study allowed determining several operating points leading to the functional compositions of 11% or 16% Sm/(Sm+Co) ratio.
Keywords :
cobalt alloys; electrodeposition; electrolytes; metallic thin films; micromechanical devices; samarium alloys; DC electrodeposition; Hull cell; SmCo; SmCo thin films; aqueous solution; cobalt concentration; electrodeposition; electrolytic solution; functional compositions; mode continuous; operating points; pulsed current; pulsed electrodeposition; Cobalt; Current density; Films; Magnetic materials; Micromechanical devices; Samarium;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location :
Cannes
Print_ISBN :
978-1-4673-0785-7
