Coupled electro-mechanical transducers for vertical to horizontal motion translation

This paper reports a Micro-Electro-Mechanical System (MEMS) for vertical to horizontal motion translation. The device, based on coupled electro-mechanical transducers, allows translating an out-of-plane displacement to an in-plane displacement. As a proof of concept, the system was used to tune the cavity length of an optical resonator based on an asymmetric Fabry-Perot (FP) cavity. The monitoring of the translated in-plane motion was done by tracking the spectral position of the FP resonance. We report the translation of a 1.70 μm vertical motion to a 0.57 μm horizontal displacement.