Simulation and experimental analysis of thermo-mechanical behavior of microresonators under dynamic loading

Simulation, finite element analysis and experimental investigations of the dynamical response of a microresonator under electrostatic actuation are presented in this paper. The scope is to characterize the influence of thermo-mechanical behavior of the material on the frequency response, amplitude and velocity of oscillations under continuous actuation. The effect of thermoelastic damping on vibrating structures is experimentally investigated by measuring the loss in amplitude and velocity of oscillations as a function of time and the changes in quality factor. The tests are performed in ambient conditions and in vacuum in order to separate the extrinsic damping of beam by the intrinsic effect given by thermoelastic damping. The vibrating structure under investigations is a polysilicon clamped-clamped beam.