Failure analysis of microstructure under shock load

Reliability was one of the key issues in practical application of MEMS sensors and actuators while failure mode and mechanism of the microstructures was still lack of enough understanding. Based on the circumstance of a projectile launched in which the MEMS actuator works, a micro cantilever was selected as the representative object of study and the corresponding mechanical model under shock load was established to make failure analysis in this article. The effect of geometry parameters changing on the mechanical properties of the cantilever was studied. The result of theoretical analysis was verified the correctness through the FEM simulation. The conclusion of the research could be used to guide the failure analysis of micro device so as to provide theoretical basis for reliability design of MEMS sensor and actuator.